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ID21 - X-ray Microscopy Beamline


ID21 has focussed its activity on the in-vacuum scanning X-ray microscope (SXM). Following the EBS upgrade, the transfer to the BLISS control system and the installation of a new double crystal monochromator, the microscope offers a beam of ~ 0.3µm Vx0.7µm H for 2D µXRF (elemental maps) and µXANES (chemical speciation in 0D, 1D and 2D) in the energy range 2-10 keV, in cryo genic mode or at room temperature. An additional nanoscope is currently under commissioning, and should be available to users in 2024.
Status:  open


  • Medicine
  • Cultural Heritage
  • Environmental Sciences
  • Earth and Planetary Sciences
  • Materials and Engineering
  • Physics
  • Life Sciences
  • Chemistry


  • Cultural Heritage (e.g. paintings, ceramics, glasses)
  • Biology (e.g. nano-toxicology, pathology, metallobiology, health)
  • Geochemistry (e.g. basaltic glasses, sediments)
  • Environmental sciences (e.g. soils, phytoremediation, pollution)
  • Materials (e.g. nano-materials, energy)


  • MicroXANES - micro X-ray absorption near-edge structure
  • MicroXRF - micro X-ray fluorescence
  • XANES - X-ray absorption near-edge structure
  • XAS - X-ray absorption spectroscopy
  • XRF - X-ray fluorescence

Energy range

  • 2.1 - 10.0  keV

Beam size

  • Minimum (H x V) : 0.7 x 0.3  µm²
  • Maximum (H x V) : 2.0 x 2.0  mm²

Sample environments

  • SXM: In vacuum operation; Cryo-stage; Wet cell


  • SXM end-station (2.1 - 9.2 keV, 0.7 x 3 µm² to 2 x 2 mm [hxv]): regularly used Si photodiodes; SGX 100mm² SiriusSD silicon drift diode.

Technical details


M. Cotte, E. Pouyet, M. Salomé, C. Rivard, W. De Nolf, H. Castillo-Michel, T. Fabris, L. Monico, K. Janssens, T. Wang, P. Sciau, L. Verger, L. Cormier, O. Dargaud, E. Brun, D. Bugnazet, B. Fayard, B. Hesse, A. E. Pradas del Real, G. Veronesi, J. Langlois, N. Balcar, Y. Vandenberghe, V. A. Solé, J. Kieffer, R. Barrett, C. Cohen, C. Cornu, R. Baker, E. Gagliardini, E. Papillon and J. Susini, "The ID21 X-ray and infrared microscopy beamline at the ESRF: status and recent applications to artistic materials." Journal of Analytical Atomic Spectrometry (2017).

M. Salomé, M. Cotte, R. Baker, R. Barrett, N. Benseny-Cases, G. Berruyer, D. Bugnazet, H. Castillo-Michel, C. Cornu, B. Fayard, E. Gagliardini, R. Hino, J. Morse, E. Papillon, E. Pouyet, C. Rivard, V. A. Solé, J. Susini and G. Veronesi, "The ID21 Scanning X-ray Microscope at ESRF", Journal of Physics: Conference Series, 425, 182004 (2013).


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