Pulsed Laser Deposition system (PLD)
Pulsed Laser Deposition system (PLD)
Laser:
- Pulsed neodymium-doped yttrium-aluminium-garnet (Nd:YAG) Quantel 981C
- Principal wavelength 1064 nm with a maximum pulse energy of 1200 mJ
- First harmonic wavelength 532 nm with a maximum pulse energy of 600 mJ
- Second harmonic wavelength 355 nm with a maximum pulse energy of 280 mJ
- Maximum repetition rate of 10 Hz
- Pulse width of 8 ns
Sample holder:
- Heater up to 1500K (e-bombardment for fast heating; electric heater for high gas pressure; direct current for semiconductor substrates)
- Azimuthal rotation with 0.01 angular resolution
- Variable sample-target distance
- Variable height position respect to the plume center
Target holder:
- Carrousel with 6 target holders
- Two translation stages to raster the target respect to the laser (fixed laser to substrate position)
Ultra-high vacuum:
- Base UHV = 3x10-10 mbar
- O2 gas line with precise leak valve
- Second free gas line with precise leak valve
- Thermal gas cracker (maximum pressure 1x10-4mbar)
In-situ characterization:
- High energy RHEED up to 30 keV (maximum pressure 1x10-3 mbar)
- Sample holder and UHV load-lock compatible with MOKE, XPS/LEED and HAXPES set-ups
Annealing:
- Coupled oven for sample annealing up to 1300 K under 1 bar of gas (typically O2)